The SEMICON is the largest microelectronics exhibition event in Europe. It will take place in Munich, Germany from 14th to 17th November 2017. We invite you to visit our booth 858 in Hall B1.
Find out more about our high-temperature solutions for the semiconductor industry and arrange a meeting with your contact persons of SCHUPP® Ceramics on-site: Lukasz Borkowski (firstname.lastname@example.org) und Gerrie Timmer (email@example.com).
We are looking forward to interesting technical discussions at our booth!
UltraVac are three-dimensional vacuum-formed insulation products made of polycrystalline mullite/alumina wool (PCW).
The high-temperature vacuum formed parts (PCW) can be used as vestibule blocks, insulation boards or tubes and offer very precise dimensions, surface quality and homogeneity.
The structure of the vacuum-formed insulation shapes remains stable even at high temperature. Thanks to the very good thermal shock behaviour, UltraVac is suitable for use in diffusion and CVD furnaces with rapid temperature gradients up to 1500°C (2732°F) operation temperature.
We implement individual and application-specific unique insulation shapes or small series.
MolyCom®-Hyper 1800 are high purity electric heating elements made of molybdenum disilicide (MoSi2) and suitable for horizontal and vertical diffusion and CVD furnaces up to 1500°C (2732°F) operation temperature.
Thanks to their unique properties the MoSi2 elements enable a higher surface loading compared to common used electric heating like e.g. with wire and enable a homogeneous temperature distribution. Trace elements are reduced to a minimum (1/10 compared to standard MoSi2 heating elements), which makes MolyCom®-Hyper 1800 suitable for high purity sophisticated demands.
MolyCom®-Hyper 1800 heating elements can be combined with vacuum-formed insulation tubes made of polycrystalline mullite/alumina wool (PCW) to electric heating systems for oxidation/diffusion and LP CVD furnaces. They are supplied, also in complex geometries like 360° panorama heating elements
MolyTec is a customised electric heating system, which combines high purity heating elements MolyCom®-Hyper 1800 made of molybdenum disilicide (MoSi2) and vacuum-formed insulation made of polycrystalline mullite/alumina wool (PCW).
The system allows controlled and precise heating at application temperatures up to 1500°C (2732°F). MolyTec is fully compatible with all technically comparable heating systems and can be integrated into oxidation/diffusion and LP CVD furnace system.
The system is quick and easy to install and to exchange. It reduces the process time because a much higher process temperature can be reached compared to wire heating.